MSTG Subway MSTG Subway 
The MSTG Subway contains information about the AVS MSTG group and their activities.
Manufacturing Science and Technology The American Vacuum Society (AVS) has started a new cross-disciplinary Manufacturing Science and Technology Group (MSTG) focused on manufacturing, particularly microelectronics manufacturing.
Short Courses The AVS organizes and runs an extensive short course program on a variety of topics relevant ot AVS technical activities. Click here to link to the details of this activity.
Conference Announcements and Calls for Papers The Manufacturing Science and Technology Group presents the program of the AVS 46th National Symposium on October 23-29. Sessions will highlight the interactions between the semiconductor manufacturing and research communities. The deadline for abstracts is May 10.
October 2-6, 2000 -- AVS 47th International Symposium (Technical Programs, Topical Conferences, Short Course Programs, and Equipment Exhibition)
Non-MSTG Conferences ISSM 2000, Tokyo Japan. Ninth International Symposium on Semiconductor Manufacturing, September 26-28, 2000, at Hotel East 21 Tokyo, Tokyo, Japan, Sponsored by UCS, IEEE, and SEMI, Abstract Deadline: Friday, April 21, 2000 (JST)
UltraClean Processing of Silicon Surfaces 2000, UCPSS 2000, September 17 to 20, 2000, Oostende, Belgium. Abstract Deadline, March 31, 2000.
2000 International Conference on Characterization and Metrology for ULSI Technology, June 19-22, NIST, Gaithersburg, MD.
International Interconnect Technology Conference, Hyatt Regency, San Francisco Airport Hotel, June 5-7, 2000. Call for papers deadline Jan. 14, 2000.
International Symposium on Semiconductor Manufacturing - ISSM 99, Oct.11-13, 1999. Call for papers deadline is April 23.
International Interconnect Technology Conference, A new Conference serving the Interconnect Community sponsored by the IEEE on May 24-26, 1999.
195th Meeting of Electrochemical Society, May 2-6, 1999.
6th International Workshop on Measurement, Characterization and Modeling of Ultra-shallow Doping Profiles in Semiconductors. "Ultra-shallow Junctions-99". March 28-31, 1999; Sheraton Imperial Hotel, Research Triangle Park, NC, USA.
1st INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSES FOR MICROELECTRONICS, March 15-19, 1999
Past Conference Announcements & Calls for Papers The preliminary program for the Eleventh International Conference on Ion Implantation Technology (IIT 96) is available. The conference will be held in Austin, Texas, from June 16, 1996 to June 21, 1996. The associated Ion Implantation Technology school, which precedes the conference, is scheduled on June 12-15, 1996. Abstracts are due January 21, 1996.
The Manufacturing Science and Technology Group will cosponser the Third Workshop on Industrial Applications of Scanned Probe Microscopy. The conference will be held in Gaithersburg, Maryland on May 2-3, 1996. Abstracts are due April 5, 1996.
The MSTG is sponsoring the Second Workshop on Industrial Applications of Scanned Probe Microscopy . The conference is May 2-3, 1995. Extended abstracts are due by April 3, 1995.
The MSTG is sponsoring a four day program on semiconductor manufacturing as a regular part of the AVS 42nd National Symposium to be held at the Minneapolis Convention Center on October 16-20, 1995. The deadline for abstracts is May 5, 1995.
The Electrochemical Society has a call for papers (deadline extended to Dec. 15, 1994) for the Symposium on Control, Diagnostics, and Modeling in Semiconductor Manufacturing I in May, 1995.
The International Semiconductor Characterization Workshop will be hosted by the National Institute of Standards and Technology (NIST), and is to take place from January 30 through February 2, 1995 at NIST headquarters in Maryland.
Conference Proceedings Characterization and Metrology for ULSI Technology, March, 1998. Published by AIP Press look under Conference Proceedings by book name.
A summary of the proceedings for The Eleventh Ion Implantation Technology Conference, held in Austin, Texas, June 12-21, 1996, are available.
The proceedings of the International Workshop on Semiconductor Characterization: Present Status and Future Needs (held in January 1995) are availbable.
The proceedings of the Workshop on Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors (held in March 1995) are available.
Organizations The American Vacuum Society has 8 established Divisions and 2 Technical Groups. The Divisions are: Applied Surface Science, Electronic Materials and Processing, Nanometer-scale Science and Technology, Plasma Science and Technology, Surface Science, Thin Film, Vacuum Metallurgy, and Vacuum Technology. The Technical Groups are: Manufacturing Science and Technology, and Biomaterial Interfaces. Explore this Web site for more details on the upcoming National Symposium and Short Courses (October 14-18, 1996) specifically of interest to the Semiconductor Industry.
The scope of the metrology roadmap includes particle identification, metallic and organic contamination analysis, and analytical instrumentation needs for Materials and Bulk Processes. Process development and control requirements will drive performance specifications. Methods for achieving realtime process control are presented here.
The NIST National Semiconductor Metrology Program (NSMP) funds metrology development work within NIST, and is managed by the Office of Microelectronics Programs.
The NIST Semiconductor Electronic Division (SED) provides leadership in developing the semiconductor measurement infrastructure essential to improving U.S. economic competitiveness. The Division, with a staff of over 60, is based in Gaithersburg, Maryland. The Division is one of five divisions within the Electronics and Electrical Engineering Laboratory at NIST. The primary mission of the Division is to provide the measurement infrastructure to the U.S. industry for mainstream CMOS technology.
NIST Update is one of NIST's Newsletters published every two weeks, highighlighting research, activities, and services.
Semiconductor International is "the industry's source book for processing, assembly, and testing". SI is a monthly publication, and it's Website includes: News and Feature Article Abstracts; Product Introductions; Industry Links; Literature Reviews; Cahners Connection Link; Product Data Source; Events Calendar; and a Subscription Form.
Magazines of Interest
About the MSTG Subway The MSTG Subway is maintained by the AVS and is linked to the Semiconductor Subway, which is maintained by the MIT Microsystems Technology Laboratories, in an effort to foster education and communication in microsystems and semiconductor technology.