ION IMPLANT TECHNOLOGY CONFERENCE 1996

XIth International Conference on Ion Implant Technology & School

Second Announcement

The Eleventh International Conference on Ion Implantation Technology (IIT 96) will be held in Austin, Texas, from June 16, 1996 to June 21, 1996. The associated Ion Implantation Technology school, which precedes the conference, is scheduled on June 12-15, 1996. The objective of this biannual conference is to stimulate discussion on subjects related to ion implantation among a broad mix of specialists. This forum will also discuss the most recent aspects of ion implantation. Another goal is to stimulate direct contact between the participants and specialists.

CONFERENCE THEMES:

1. Trends in Processing and Devices
CMOS & BiCMOS, Bipolar Technology, Flat Panel Displays, HEMT, MESFET, SOI

2. Process Control
Beam Heating/Resist Degradation, Charging/Electron Showers, Contaminants and Particles, Dose Rate Effects, Evaluation Techniques, Oxide Integrity, Process Modeling, Real-time Monitors, Standards/Calibration

3. Manufacturing Applications
SPC & Process Control, Risk Assessment and Risk Management, Increasing Throughput, Qualifications and Matching Equipment

4. Advanced Implanter Systems
Acceleration/Deceleration Stages, Beam Monitoring Systems, Beam Purity, Ion Optics, Multiple Charges and Molecular Sources, New developments of High Current, High Energy and Very Low Energy Ion Implanters, Positive and Negative Ion Sources, Scanning Systems, Vacuum Technology

5. Ion-Solid Interaction (from eV to MeV)
Ranges/Profiles, Lateral Profiles, Damage, Channelling, Sputtering, Computer Modeling

6. Materials Science
Annealing and Residual Damage, Defect Engineering, Film Adhesion Modification, Gettering and Buried Layers, Ion Beam Mixing, Ion Beam Synthesis, Ion Implantation for Opto- electronic Devices, Ion induced Phase Transitions, Silicides, Transient and anomalous Diffusion

7. Future Trends and Applications
Applications of High Energy Implantation, Shallow Junction Implantation, Very Large Wafer Processing, Flat Panel Implantation, Composite Substrate, Plasma Implantation

MANUFACTURERS EXHIBITION

A manufacturers exhibition of Ion Beam, Processing and vacuum related equipment will be accommodated in the same facility as the Conference. The technical program will include scheduled times for the exhibition, where refreshments will be provided. Potential exhibitors may obtain further information by writing or emailing to the Conference Chairmen.

TECHNICAL SESSIONS

There will be both oral and poster sessions. The sessions will be run consecutively, and will be introduced by keynote papers presented by invited speakers of International repute. The official language of the conference will be English, which will be used for the presentations and for the printed materials.

CALL FOR PAPERS:

Participants wishing to present an oral or poster paper are invited to submit an abstrac, the original plus 2 copies, to the Conference Chairmen before Jan. 21, 1996. The papers must be relevent to one of the themes listed above. The abstract must be camera ready, typed single spaced in 10 point font or larger, and fill a 10cm by 18cm space on one page. It should also include the Title and Authors. Results, Figures, and references should be included on seperate pages. The presenting author's name should be underlined and his/her full address, phone #, and FAX # should be included. Please indicate which session theme above is most appropriate to your paper. Notification will be given by March 15, 1996.

IMPORTANT DATES:

Submission Deadline for Abstracts - January 21, 1996
Final call for registration - February 1996
Notification of acceptance of papers - March 15, 1996
School: June 12 - June 15, 1996
Conference: June 16 - June 21, 1996

LOCATION:

Stouffer Renaissance Austin Hotel - Austin, Texas - U.S.A.

Participants are requested to submit inquiries to: iit96@sematech.org

or write to the Co-chairs: 

     Larry Larson/IIT96           Al Tasch/IIT96
     SEMATECH                     Mail Code R9950, MER 2.606E
     2706 Montopolis Drive        University of Texas at Austin
     Austin, Texas  78741  USA    Austin  TX  78712    USA