The Eleventh Ion Implantation Technology Conference
Austin, Texas
June 12-21

Approximately 520 scientists and engineers from twenty-one countries gathered June 16- 21 to discuss the latest developments in ion implantation technology and the requirements for new ion implantation equipment to meet future needs of the semiconductor industry. The conference was comprehensive in scope, with topics ranging from the fundamentals of ion-solid interactions to manufacturing applications and control of ion implant systems. This event was co-chaired by Larry Larson of SEMATECH and Al Tasch of the University of Texas at Austin. A special recognition was given by Ken Purser of Southern Cross to Dr. Peter Rose, one of the founders of the conference more than twenty years ago. Rose was honored during the opening session for having been selected to receive the Presidential Medal for Technology for his part in developing the Ion Implantation industry; he founded both the Extrion Corporation (now Varion Ion Implant System Division) and the Nova Corporation (now Eaton, Semiconductor Equipment Division). The conference featured 64 oral presentations and 200 posters over the seven conference themes. Those Conference themes are: Trends in Processing and Devices, Process Control, Manufacturing Applications, Advanced Implanter Systems, Ion-Solid Interactions (from eV to MeV), Materials Science, and Future Trends and Applications. This conference was sponsored by SEMATECH, The University of Texas at Austin, Applied Materials, Eaton, and Varian in addition to several smaller supporters. Technical Sponsorship has been extended by the IEEE (Electron Devices Society) and by the AVS (Manufacturing Science & Technology Group). The proceedings will be published by the IEEE in early 1997.

An equipment show accompanied the conference in a facility that allowed us to combine the show, the poster sessions and the evening receptions in one area. Fifty eight suppliers participated in that equipment show. The conference was preceded by a short course June 12-15 which attracted approximately 180 students. The Austin conference follows one held two years ago in Catania, Italy, and will reconvene in 1998 in Nara, Japan. Professor Isao Yamada of Kyoto University will be the Chair of that conference.

For more details, contact:

Dr. Larry Larson, Conference Chair
Doping Program Manager
SEMATECH
2706 Montopolis Drive
Austin TX 78741
Phone: 512-356-7145
FAX: 512-356-7640
Email: Larry.Larson@SEMATECH.org