*Nanometer-scale Science & Technology Division

ORGANIZING COMMITTEE
John Dagata, NIST - Gaithersburg
Rich Colton, Naval Research Laboratory
Alain Diebold, SEMATECH
Ken Shih, University of Texas at Austin

PROGRAM COMMITTEE
John Moreland, NIST- Boulder
Andy Gilicinski, Air Products and Chemicals
Greg Meyers, Dow Chemical
Walter Duncan, Texas Instruments

WORKSHOP DESCRIPTION: This meeting will explore progress toward meeting
standardization  and development needs in scanned probe microscopy since the
previous  workshops on industrial applications of SPM. Summary  reports on
the first two IASPM workshops are available as NISTIR  5550 (December 1994)
and NISTIR 5752 (November 1995).   Focus Sessions will concentrate on
Semiconductors, Polymers and  Coatings, and Magnetic Data Storage
Technology. Highlights include  talks on recent developments in critical
dimension metrology,  defect analysis by SPM-based capacitance and
near-field optical  techniques, achieving chemical specificity and
understanding  resolution limits in polymer imaging, magnetic force
measurements,  and disk tribology, as well as many other important topics.
The   final session will examine progress on defining standards and
standard practices and survey recent developments in novel SPM
instrumentation capabilities.

Workshop Objective: Focus Sessions will be limited to Industrial
Applications of SPMs  in the areas of Semiconductors, Polymers and Coatings,
and Magnetic  Data Storage Technology. Emphasis will be on assessing
progress  toward meeting Standardization and Instrument Development Needs.

Poster Presentations: Oral presentations will be short and narrowly focused.
Poster  sessions are an effective means for promoting information exchange
and informal discussion among workshop participants. Everyone  attending the
meeting is strongly encouraged to contribute a poster  presentation on any
relevant SPM or related topic. It is our  intention to schedule an hour or
more during each of the session  breaks for poster viewing and informal
discussion.  Two-page extended abstracts prepared in camera-ready form for
all  invited talks and poster session presentations are due by April 5,
1996, for inclusion in the technical program. Text should be  arranged in a
single-column format, with at least one-inch borders  on all sides. Figures
may be included. The technical program will  be distributed at the workshop.

Please send extended abstracts to:

John A. Dagata National Institute of Standards and
Technology Bldg. 220, Rm. A117 Gaithersburg MD
20899-0001 Telephone: (301) 975-3597 Fax: (301)
869-0822 email: john.dagata@nist.gov

PRELIMINARY AGENDA

Wednesday, May 1
7:30 - 9:30 p.m. Reception and
Registration Gaithersburg Hilton

Thursday, May 2 Green Auditorium
8 a.m. Registration
8:30 a.m. - 6 p.m.

Session I: SEMICONDUCTORS
Session Organizer: Walter Duncan, Texas
Instruments Session Chair: Alain Diebold, SEMATECH
I. Metrology, Processing, and Defect Analysis
SPM Metrology in the Semiconductor  Industry Herschel Marchman,Texas
Instruments   Chemo-mechanical Polishing Applications Dale  Hetherington,
Sandia National Laboratories   Scanning Capacitance and Kelvin Probe
Microscopy for  Defect Analysis Jim Slinkman, IBM Yorktown Heights
Selective Dopant Profiling with AFM Ken Shih,  University of Texas - Austin

II. Developments in Near-field Optical Techniques
Device Characterization with NSOM Walter Duncan,  Texas Instruments
Spectral and Temporal Contrast in NSOM Imaging  Michael Paesler, North
Carolina State Univeristy

Session II: POLYMERS AND COATINGS
Session Organizer: Greg Meyers, Dow
Chemical Session Chair: Rich Colton, NRL
I. Industry Overviews
SPM Applications for Latex and Epoxy Coatings Andy  Gilicinski, Air Products
and Chemicals   SPM Applications in the Automotive Industry Mark  Everson,
Ford Motor Company

II. High-Resolution Imaging of Polymer Surfaces and  Interfaces
AFM of Polymers at the Nanoscale: From Imaging to  Probing of Mechanical
Properties Sergei Magonov, Digital  Instruments
Structural Characterization of Polymer Surfaces and  Interfaces
MiriamRafailovich, SUNY- Stonybrook

III. Physical/Chemical Property Measurements of  Polymers and Coatings
Chemical Force Microscopy Charles M. Lieber,  Harvard University
AFM Studies of Ultra thin Molecular Layers from  Polymers Vladimir Tsukruk,
Western Michigan University

7:30 - 10:00 pm ASTM E42.14 Subcommittee Meeting Gaithersburg Hilton

Friday, May 3 Green Auditorium
8:30 a.m. - 6 p.m.
Session III: MAGNETIC DATA STORAGE TECHNOLOGY
Session Organizer and Chair: John Moreland, NIST-Boulder
I. Disk Tribology and Surface Texture
Tribological Issues of Magnetic Storage  Devices Singh Bhatia, IBM Almaden
AFM Tribological Characterization of Drive Components  Bal Gupta and Dallas
Meyer, Seagate Technologies
Characterization of Ultra Thin Overcoats with SPM  David Bogy, University of
California   Berkeley
Surface Texture of Recording Heads Peter Hopkins,  Quantum Peripherals

II. Magnetic Force Microscopy   MFM for MR Head Development Allen Schultz,
Seagate  Technologies
Correlation of Inductive Head Read-Back Signals to  MFM Images Jay
Hoinville, Maxtor Corporation
Standard Practices for MFM Paul Rice, NIST-Boulder
Prospects for Quantifying MFM I. D. Mayergoyz,  University of Maryland

Session IV: SPM STANDARDIZATION AND INSTRUMENT
DEVELOPMENT NEEDS
Session Organizer: John Dagata, NIST-Gaithersburg
Session Chair: Ken Shih, University of Texas  Austin
 I. Standards Development
Standardization Efforts  in Surface Topographic Measurements Ted Vorburger,
NIST-Gaithersburg
Calibrated AFM Ronald Dixson, NIST-Gaithersburg
Statistical Data Analysis Jan Jorgensen, Danish  Institute for Fundamental
Metrology
Status of Tip Modeling John Villarrubia,  NIST-Gaithersburg

II. Instrumentation Developments
Nanomanipulator: A Teleoperator for Manipulating  Materials at the Nanometer
Scale Richard Superfine, University of  North Carolina
Evaluation of SPM Hardness Measurements Sean  Corcoran, NRL
Rocking Beam AFM Joe Griffith, AT&T Bell Labs
The Nanoscilloscope: A combined  Scanning-Force/Near-Field Instrument for
Broadband Proximal Probing  of Integrated Circuits Daniel van der Weide,
University of  Delaware

DISCUSSION: A Framework for Standards Development and  the Future of IASPM
workshops John Dagata, NIST-Gaithersburg

LOCATION: National Institute of Standards and Technology,  Administration
Building (101), Green Auditorium, Gaithersburg,  Maryland. Gaithersburg is
located approximately 20 miles north of  Washington, D.C.

REGISTRATION:  The registration fee of $170 includes a welcoming  reception,
coffee breaks, lunches, workshop materials, and a copy  of the Workshop
Summary Report. The enclosed registration card must  be received by April
17, 1996, for your name to appear on the  preliminary participants' list.
Request for cancellation and refund  must be submitted to Lori Phillips, in
writing, prior to April 17,  1996.

ACCOMMODATIONS: A block of rooms has been reserved at the Gaithersburg
Hilton, (301) 977-8900. The special workshop rate is $80, single  or double,
plus 10% tax. To register for rooms, please send the  enclosed hotel
reservation card directly to the hotel no later than  April 10, 1996. After
that date the rooms will be released for  general sale at the prevailing
rates of the hotel. Reservations  must be cancelled before 4 p.m. on the
arrival date. Check-in time  is 3 p.m.; check-out time is 1 p.m.

TRANSPORTATION:
BWI Super Shuttle (301) 369-0009, offers commercial van  service from
Baltimore-Washington Airport to the Gaithersburg  area.Crystal Airport
Shuttle, (301) 972-2222, is available from  Dulles International and
Washington National Airports to  Gaithersburg. Call for reservations.    The
Washington Metro has subway service to  Gaithersburg. The Metro System can
be boarded at Washington  National Airport. Take the Yellow Line train
marked "Mount Vernon  Square" to Gallery Place. Transfer to a Red Line train
marked  "Shady Grove" to the Shady Grove station in Gaithersburg. Taxis are
available from the Metro to the hotel by calling Action Taxi at  (301)
840-1222.  A NIST shuttle van for official visitors operates from the Shady
Grove metro station to NIST. The van leaves the Shady Grove station  on the
quarter and three-quarter hour (e.g. 8:15, 8:45, . . .4:45,  5:15) from the
west side "Kiss and Ride" parking lot.  A hotel van is available from the
Gaitherburg Hilton to NIST each  day. Please request this service at the
hotel front desk at  check-in. Parking at NIST may be limited. Attendees are
encouraged  to use this van service.

RECEPTION:A welcoming reception and registration will be held at the
Gaithersburg Hilton on Wednesday evening, May 1, from 7:30-9:30  p.m.

TECHNICAL INFORMATION: John Dagata NIST Telephone: (301) 975-3597 Fax:
(301) 869-0822 e-mail: john.dagata@nist.gov

REGISTRATION INFORMATION: Lori Phillips NIST Telephone: (301)
975-4513 Fax: (301) 948-2067 e-mail: lori.phillips@nist.gov