To be held at the
NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Gaithersburg MD 20899
Alain Diebold (SEMATECH), Ken Shih (UTexas, Austin), Rich Colton (NRL), John Dagata (NIST)
John Moreland (NIST), Andy Gilicinski (Air Products), Herschel Marchman (AT&T Bell Labs), Jason Schneir (NIST), Joe Griffith (AT&T Bell Labs)
We are pleased to announce that a second Workshop on Industrial Applications of Scanned Probe Microscopy (IASPM) will be held at NIST on May 2-3 1995. The purpose of this meeting is to continue the exploration of SPM standardization and development needs anticipated for the next decade by including new topic areas for presentation and by continuing to build on the major standardization issues which were identified during the first IASPM workshop.
The agenda for the workshop appears on the following pages. It consists of three focus sessions on SPM applications for Magnetic Data Storage, Polymers and Coatings, and Semiconductors. Each session begins with an overview of the specific industrial requirements for quantitative SPM measurements in that area, followed by reports on how industry, university, and government researchers are integrating SPMs into process control and inspection at critical steps in manufacturing and into R&D. Highlights include several talks on recent developments in magnetic force and near-field optical techniques, the growing experience of users with in-line or in-fab inspection tools, and the impact of SPM instruments on the development of coatings with superior mechanical and structural properties.
The fourth workshop session will examine progress which has occurred within the applied SPM community during the past year towards defining and delivering standards and standard practices. (A Summary Report for the first IASPM is available as NISTIR #5550.) To assist the dialogue among the various constituents of the applied SPM community, part of this session will be devoted to providing participants with a better understanding of how NIST and ASTM E42.14 view their roles in delivering artifacts and documents for SPM applications to industrial users. The SPM vendors are a crucial part of this dialogue as well. They will describe how they have responded to the instrumentation and software development needs expressed by the participants at the first IASPM.
As before, the oral presentations will be short and narrowly focused, with the intention of developing the overall theme of the sessions and prompting further discussion and interaction among the participants. All workshop participants are encouraged to contribute a poster presentation on any relevant SPM or related topic. It is our intention to again schedule a generous amount of time during each of the breaks for poster viewing and informal discussion.
The workshop will begin at 8:00 AM on Tuesday May 2 1995 be held in the Green Auditorium of NIST. There is no charge for attending this workshop. A reservation form is included here. Please register by April 3 1995. Abstracts are due by the same date for inclusion in the Technical Program which will be distributed at the workshop. A detailed agenda will be mailed to all registered participants by mid-April.
Session Organizer and Chair: John Moreland, NIST-Boulder
Session Organizer: Andy Gilicinski, Air Products &Chemicals
Session Chair: Rich Colton, Naval Research Laboratory
Session Organizer: Herschel Marchman, AT&T Bell Labs
Session Chair: Ken Shih, Univ of Texas - Austin
(1) __ I will attend the workshop
(2) __ I will present a poster entitled:___________________________________
NAME: ___________________________________________________
AFFILIATION: ___________________________________________________
ADDRESS: ___________________________________________________
___________________________________________________
___________________________________________________
TELEPHONE: ________________________
FAX: ________________________
EMAIL: ________________________
PLEASE NOTE :
(1) There is no fee for attending this conference. Registration is required, however, because of the limited size of the conference facilities. Please register as early as possible.
(2) Two-page Extended Abstracts prepared in camera-ready form for all Invited
Talks and
Poster Session Presentations are due by April 3 1995 for inclusion in the
Technical Program. Text should be arranged in a single-column format with at
least one-inch borders on all sides. Figures may be included. The Technical
Program will be distributed at the workshop. Please send Extended Abstracts
to:
John A. Dagata
National Institute of Standards and Technology
220-A107
Gaithersburg MD 20899
ph: 301-975-3597
fax: 301-869-0822
dagata@enh.nist.gov
The Industrial Applications of Scanned Probe Microscopy meeting will be held in
the Green Auditorium at NIST on May 2-3, 1995 . A room block will be held at
the Gaithersburg Hilton until April 10. The reservation number for the Hilton
is 301-977-8900. Participants are responsible for making their own
reservations.
Gaithersburg Hilton
620 Perry Parkway
Gaithersburg, MD 20877
301-977-8900
Travel
BWI Limo, 301/441-2345, is available from the Baltimore-Washington International Airport to Gaithersburg.
Montgomery Airport Shuttle, 301/990-7005, is available from Dulles International and Washington National Airports and BWI International Airport to Gaithersburg.
The Washington Metro has subway service from Washington National Airport. The Metro System can be boarded at the National Airport metro stop. Take a yellow line train to Gallery Place, and transfer to a red line train to Shady Grove. Service is every 6 to 15 minutes depending on the time of day. The time from National to Shady Grove is about 50 minutes. The Shady Grove station is approximately 4 miles from NIST. Taxi service is available from the metro to the Gaithersburg area.
NIST provides shuttle service from the Metro for official visitors and staff. The Shuttle leaves on the quarter hour from the West side Kiss and Ride area(e.g., 9:15, 9:45...4:15, 5:45). No reservations are necessary.
Coffee Breaks and Lunches
Coffee breaks will be provided throughout the day. However, lunches are not provided for this meeting. The NIST cafeteria will be open to attendees. A list of local restaurants will be available at the meeting.
Limited transportation will be available between the Hilton and NIST prior to and after daily sessions.